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INFICON SMTBM20A – Advanced Vacuum Measurement Solutions

The INFICON SMTBM20A is a high-precision vacuum measurement module designed for semiconductor manufacturing processes, offering exceptional accuracy and reliability.

Operating Range:-40°C to +100°C (-40°F to +212°F)

Accuracy:+/- 1% of reading or +/- 2 Pa (±0.1 Torr)

Response Time:< 5 seconds

Pressure Measurement Range:0.01 Pa to 100 kPa (0.001 Torr to 1000 Torr)

Vacuum Sensor Technology:Cold Traps, Ion Gauge, and Thermal Gauge

Power Consumption:Less than 50 mW

Connection Type:M20 Female Socket, Two Electrical Connections, SUS316 Blind Plug

    The INFICON SMTBM20A is a cutting-edge thermal measurement module, specifically engineered for demanding industrial environments. This module boasts unparalleled precision, capable of delivering accurate temperature readings within +/-0.5°C at 25°C, ensuring optimal performance under a wide range of operating temperatures (-40°C to +85°C).

    Featuring a rapid response time of less than one second, the SMTBM20A ensures real-time monitoring, critical for applications requiring immediate data feedback. Its energy-efficient design, consuming only 0.5W, makes it suitable for power-sensitive systems without compromising on performance.

    With RS-485 and Modbus connectivity options, the module seamlessly integrates with various industrial control systems, providing a versatile communication interface for data exchange. This feature is particularly advantageous in complex setups where compatibility with multiple systems is essential.

    Compact yet robust, the SMTBM20A measures 85mm x 20mm x 10mm, making it ideal for space-constrained applications. Its durability and compact size do not come at the expense of functionality, allowing for easy integration and deployment.

    Backed by INFICON’s commitment to quality and innovation, the SMTBM20A is manufactured using premium materials and adheres to stringent industry standards. This ensures not only reliability and longevity but also ease of maintenance and replacement.

SMTBM20A INFICON

SMTBM20A INFICON




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