Lam Research 810-069751-114 High Precision Semiconductor Process Module

Brand:LAM

Model:810-069751-114

Series:Industrial Control Module

Operating Voltage:24 V DC

Communication Protocol:PROFIBUS DP

Current Rating:Up to 2 A

Operating Temperature Range:-25°C to +70°C

Protection Rating:IP67

Weight:0.5 kg

Dimensions:150 mm x 100 mm x 70 mm

    The Lam Research 810-069751-114 Plasma Etch Module is engineered for precision etching in semiconductor fabrication.

     With its state-of-the-art design, this module ensures consistent and reliable etching results across a wide range of materials.

     Its advanced control interface and communication protocols make it easy to integrate into existing manufacturing systems.

     The module’s chuck temperature range allows for precise control over the process environment, ensuring optimal results for each application.

     Certified to meet industry standards, this module is a trusted choice for semiconductor manufacturers seeking high-performance plasma etching solutions.