ZYGO Announces Next-Generation Laser Measurement System: The ZMI-4104

MONROE, CT – June 1, 2024 – ZYGO Corporation, a global leader in high-precision optical metrology and advanced laser measurement solutions, today unveiled its latest innovation, the ZMI-4104, a cutting-edge laser interferometer system designed to redefine accuracy, speed, and versatility in industrial and research applications.

Unmatched Precision for Demanding Industries
The ZMI-4104 builds on ZYGO’s five-decade legacy of metrology excellence, offering sub-nanometer resolution and ultra-low noise performance for critical measurements in semiconductor manufacturing, aerospace, precision optics, and advanced microscopy. Engineered with a new generation of stabilized helium-neon (HeNe) laser technology, the system delivers unparalleled repeatability, even in challenging environments with temperature fluctuations or mechanical vibrations.

“The ZMI-4104 is a game-changer for industries where microns matter,” said Dr. Sarah Collins, ZYGO’s Chief Technology Officer. “Its adaptive algorithms and multi-axis capabilities enable real-time error correction, ensuring data integrity for next-gen applications like EUV lithography, freeform optics fabrication, and quantum device assembly.”

Key Features Driving Innovation

  • High-Speed Dynamic Measurement: Capable of sampling rates up to 10 kHz, the ZMI-4104 captures rapid motions and vibrations critical for robotics calibration, wafer stage testing, and machine tool verification.
  • Smart Connectivity: Integrated Ethernet, USB-C, and IoT-ready interfaces streamline integration with factory automation systems and cloud-based analytics platforms.
  • User-Centric Design: An intuitive touchscreen interface and AI-assisted diagnostics reduce setup time, while ruggedized construction ensures reliability in harsh industrial settings.
  • Multi-Wavelength Compatibility: Supports simultaneous measurement across multiple axes, enabling complex 3D volumetric error mapping for large-scale systems.

Sustainability and Global Support
Aligning with ZYGO’s commitment to sustainability, the ZMI-4104 consumes 30% less power than previous models and features modular components for easy upgrades, extending its lifecycle. Customers worldwide will benefit from ZYGO’s 24/7 technical support network and ISO 17025-accredited calibration services.

Availability and Applications
The ZMI-4104 will debut at the LASER World of Photonics 2024 in Munich, Germany, with shipments starting in Q3 2024. Early adopters include semiconductor leaders and national research labs seeking to optimize yield rates in advanced chip fabrication processes.

“With the ZMI-4104, we’re not just measuring precision—we’re enabling the future of manufacturing and scientific discovery,” added Dr. Collins.